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	Author	X. Binefa; Jordi Vitria; Juan J. Villanueva
	Title	Three dimensional inspection of integrated circuits: a depth from focus approach.			Type	Conference Article
	Year	1992	Publication	SPIE/IS&T Symposium on Electronic Imaging (Conference on Machine Vision in Microelectronics Manufacturing)	Abbreviated Journal
	Volume		Issue		Pages
	Keywords
	Abstract
	Address
	Corporate Author				Thesis
	Publisher		Place of Publication		Editor
	Language		Summary Language		Original Title
	Series Editor		Series Title		Abbreviated Series Title
	Series Volume		Series Issue		Edition
	ISSN		ISBN		Medium
	Area		Expedition		Conference
	Notes	OR;MV			Approved	no
	Call Number	BCNPCL @ bcnpcl @ BVV1992a			Serial	250
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